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Advanced materials research without locking up central infrastructure.

Moorfield platforms support exploratory thin-film, plasma and thermal workflows where researchers need quick process access, unusual material flexibility and a lower-friction path from idea to usable process data.

Advanced materials research without locking up central infrastructure.

Application fit

Exploratory materials

Develop and screen metal, oxide, nitride, carbon, polymer-compatible and hybrid thin-film stacks before transferring mature processes to larger infrastructure.

Dedicated process cells

Create a local sandbox for non-standard materials, contamination-sensitive trials and rapid experimental changes.

Surface preparation and pattern transfer

Use benchtop plasma cleaning and RIE for research-scale surface activation, soft etch and materials studies.

Thermal optimisation

Use local anneal capability to explore crystallisation, contact improvement and material-property changes.

Relevant Moorfield platforms

nanoPVD systems

nanoPVD systems

Benchtop sputtering and evaporation for rapid materials iteration.

  • Metals, oxides and nitrides
  • Electrodes and seed layers
  • Reactive/co-deposition studies

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nanoETCH

nanoETCH

RIE and plasma cleaning for specialist materials and surfaces.

  • Argon plasma cleaning
  • Soft etch workflows
  • Research-scale RIE access

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Research examples

Moorfield application examples include nanoPVD metal electrode deposition, graphene-related workflows, fluorine etching of h-BN/SiO2/Si, Ti film sputtering and ceramic/metal thin-film studies. Bioz-linked Moorfield results also point to nanoPVD and MiniLab use across advanced materials publications.

nanoPVD: Benchtop Metal Electrode Deposition
nanoETCH: Fluorine etching with the nanoETCH
Bioz: nanoPVD systems publication signal

How compact platforms help

Advanced materials groups often need a practical approach for rapid thin-film, plasma and thermal experiments before committing time on larger shared infrastructure. Compact Moorfield platforms provide local access for small-batch process development, unusual material studies and fast recipe iteration.