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MiniLab modular PVD system for thin-film research and development

Benchtop and modular PVD systems

PVD systems for research-grade thin-film development

Choose compact nanoPVD platforms or configurable MiniLab systems for sputtering, evaporation and modular deposition workflows around your materials and substrates.

nanoETCH benchtop plasma etch system for semiconductor workflow development

Benchtop ETCH and semiconductor workflow

Local plasma etch and surface preparation for semiconductor R&D

Bring selected RIE, plasma cleaning and surface preparation steps closer to device-development teams before committing process time on shared cleanroom tools.

MiniLab chamber hardware for small-batch thin-film scale-up workflows

Scale-up systems

Move from R&D samples to small-batch coating routines

Use configurable MiniLab configurations to refine deposition processes, improve repeatability and explore pilot-scale production requirements without jumping straight to a full industrial coating line.

Research challenges

Common research challenges we help solve

Limited cleanroom access

Add local capability for selected process steps before competing for shared tool time.

Novel material risk

Develop early recipes locally when materials are not yet ready for shared infrastructure.

Repeatable early-stage development

Use recipe-driven workflows to build process understanding before scale-up.

Air-sensitive handling

Discuss protected transfer and glovebox-compatible workflows where the material requires it.

Early device prototyping

Support contact layers, functional films, interfaces and selected preparation steps by workflow.

Workflow uncertainty

Clarify whether deposition, annealing, plasma etch or a combined workflow is the right starting point.

Process validation

Generate local samples and data before committing to larger facilities or external work.

Changing research priorities

Choose configurable platforms that can evolve as experimental needs become clearer.

Why Moorfield

Why research teams choose Moorfield

Moorfield systems are designed for research and process development groups that need practical capability, configurable hardware and application-led support without enterprise-scale complexity.

Research-focused systems

Platforms sized and configured for universities, R&D teams and process-development environments.

Evolving experimental needs

Configurable product families help match source, gas, substrate and integration requirements.

Different lab environments

Benchtop, modular and glovebox-compatible options support different levels of infrastructure.

Multiple process approaches

Deposition, annealing and plasma etch workflows are supported across relevant product families.

Application-led guidance

System conversations start with material, process and workflow needs rather than product lists alone.

Selection tools

Use the product selector, material selector and applications library to narrow the decision.

RF sputteringDC sputteringThermal evaporationMagnetron sputteringGlovebox integrationPlasma etchingControlled atmosphere annealingModular chamber platformsThin-film process development

Planning support

Planning a new thin-film process or lab capability?

Share your material, substrate, target process and integration requirements. Moorfield can help identify a suitable platform or configuration approach.

Ready to discuss your deposition, annealing or etch workflow?

Tell us what you are trying to build, coat, pattern or validate, and we’ll help you identify a suitable Moorfield platform.