Benchtop and modular PVD systems
PVD systems for research-grade thin-film development
Choose compact nanoPVD platforms or configurable MiniLab systems for sputtering, evaporation and modular deposition workflows around your materials and substrates.
Product families
Match your process needs to a Moorfield platform
Benchtop Systems
Compact deposition, annealing, plasma etch and selected CVD workflows for research labs.
Modular PVD Systems
Configurable MiniLab platforms for sputtering, evaporation and protected process approaches.
Glovebox PVD Systems
Deposition access for air-sensitive or protected-transfer workflows.
Decision tools
Tools to help you choose
Product selector
Match your workflow to a Moorfield platform using application area, environment, substrate and process constraints.
Material selector
Explore deposition guidance by material, including evaporation, sputtering and process considerations.
Build the right Moorfield configuration for your research
Share your materials, substrates, process gases and workflow constraints. Moorfield will help specify a practical system configuration.