Glovebox PVD Systems
Glovebox-Compatible PVD Systems
Glovebox-Compatible PVD Systems
Integrated deposition methods for air-sensitive thin-film materials and protected device workflows.
Moorfield glovebox-compatible PVD systems help researchers keep sensitive materials under controlled atmosphere while retaining modular deposition capability.
Research-grade capability without enterprise complexity
This platform is positioned for research teams that need controllable thin-film process access, practical laboratory integration and clear configuration choices.
- Protected process transfer for oxygen and moisture-sensitive materials
- Clear routing to MiniLab 026 and MiniLab 090 platforms
- Sputtering and evaporation options by configuration
- Strong fit for perovskites, OLEDs and sensitive interfaces
- Research flexibility without implying every product is glovebox compatible
Typical configurations
Use these examples as starting points. Moorfield can refine the final specification around your materials, substrates, gases, recipes and workflow constraints.
MiniLab 026 configuration
For compact glovebox-aware modular workflows.
- Compact modular platform
- Air-sensitive materials
- Sputtering and evaporation options
MiniLab 090 configuration
For larger glovebox-compatible modular PVD workflows.
- Protected process transfer
- Up to 11 inch substrate positioning
- Sensitive device stacks
Application-specific integration
For projects where atmosphere control defines the process approach.
- Glovebox interface discussion
- Process and transfer planning
- Application-led configuration
Not sure which configuration is right for your research?
Discuss Your ApplicationKey features
Modular research architecture
Configure sources, chambers, stages and monitoring around the research programme.
Multi-technique capability
Combine sputtering, evaporation, e-beam and specialist process modules where required.
Advanced process control
Support for recipe-led workflows, monitoring, gas handling and advanced power options.
Scalable laboratory integration
Move beyond benchtop limits without defaulting to production-scale complexity.
Application-specific options
Glovebox, load-lock, bias, heating and diagnostic options can be specified by project.
Long-term adaptability
The system can be configured and expanded as research priorities evolve.
Options and upgrades
Configure the platform around the process approach, substrate handling, automation and laboratory services your application needs.
Technical specifications
A scannable overview of the core platform. Exact specifications depend on final configuration.
| System type | Glovebox-compatible PVD systems |
|---|---|
| Compatible platforms | MiniLab 026 and MiniLab 090 |
| Best fit | Air-sensitive materials and protected device workflows |
| Processes | Sputtering and evaporation methods by configuration |
| Applications | Perovskites, OLEDs, organic electronics, PV and sensitive interfaces |
Applications
Application-library examples for protected, organic and air-sensitive modular PVD workflows. Product cited is shown on each card.
Enhancing the Performance and Photostability
Publication Title: Enhancing the Performance and Photostability of Perovskite Solar Cells with a Multifunctional Light‐Management Composite
Lead facility: Aalto University
Moorfield product cited: MiniLab 090
Read applicationOrganic Light-Emitting Transistors (OLETs)
Publication Title: Hafnium Aluminate–Polymer Bilayer Dielectrics for Organic Light-Emitting Transistors (OLETs)
Lead facility: Aalto University
Moorfield product cited: MiniLab 090
Read applicationGreen Emissive Blends in OLETs
Publication Title: TCTA:Ir(ppy)3 Green Emissive Blends in Organic Light-Emitting Transistors (OLETs)
Lead facility: Aalto University
Moorfield product cited: MiniLab 090
Read applicationHigh-Efficiency Semitransparent Solar Cells
Publication Title: High‐Efficiency Semitransparent Solar Cells Based on Magnetron Sputtered Sb 2 S 3 Thin Films
Lead facility: Luleå University of Technology
Moorfield product cited: MiniLab 060
Read applicationCadmium and Zinc-Doped p-type Sb2Se3 Single Crystals
Publication Title: Cadmium and Zinc‐Doped p‐type Sb 2 Se 3 Single Crystals and Solar Cells
Lead facility: University of Liverpool
Moorfield product cited: MiniLab 080
Read applicationPV Compositional Transformation Studies
Publication Title: Compositional Transformation and Impurity‐Mediated Optical Transitions in Co‐Evaporated Cu2 AgBiI6 Thin Films for Photovoltaic Applications
Lead facility: University of Oxford
Moorfield product cited: MiniLab 080
Read applicationResources and next steps
Related systems
Build the right Glovebox PVD Systems configuration for your research
Tell us about your materials, substrates, process gases and target films. Moorfield will help specify a practical system configuration.
MiniLab 026 & MiniLab 090
MiniLab 026 and MiniLab 090 systems are glovebox-compatible for atmosphere-sensitive applications for substates up to 6″ and 11″ diameter respectively.
Glovebox PVD Systems
MiniLab 026 systems are compact, glovebox compatible and optimised for magnetron sputtering or thermal evaporation techniques for substrates up to 6″ diameter.
Techniques include thermal and low-temperature evaporation sources (for metals and organics), or magnetron sputtering sources (for metals and inorganics). Deposition sources are typically mounted on the chamber baseplate. Substrate stages are supported from the roof and can accommodate a range of substrate sizes up to 6” diameter. Substrate heating, rotation and Z-shift are available. The MiniLab 026 can be easily retrofitted to an existing glovebox.
Designed for glovebox integration
- ‘Clam-shell’ chamber
- Up to 6” diameter substrates
- Up to 3 sources
- Touchscreen HMI/PC for system control
- Equipped for easy servicing
- Comprehensive safety features and interlocks
MiniLab 090 systems are glovebox-compatible for atmosphere-sensitive applications for substates up to 11″ diameter. Tall chambers are ideal for high-performance evaporation, but magnetron sputtering is also available.
MiniLab 090 systems are floor-standing PVD tools for metals, dielectrics and/or organics deposition. All systems contain a box-type stainless-steel chamber with front and rear doors for glovebox integration (allows for both through-glovebox and external service access).
The chamber has a high aspect-ratio, ideal for long working distances for high uniformity coating via evaporative techniques, but systems can also be equipped with magnetron sputtering. A turbomolecular pumping system is standard, for high-vacuum base pressures of better than 5 × 10-7 mbar. Exact configuration is extremely flexible and dependent on customer budgets and applications. Configurations range from a manually operated thermal evaporation system up to a multi-technique tool with fully-automated process control.
Designed for glovebox integration
- Modular design
- Front sliding door for in-glovebox loading
- Rear door for service access
- Up to 11” diameter substrates
- Comprehensive safety features and interlocks