Quick comparison
Use these tables as a first-pass guide to the main platform differences. Final specification depends on source configuration, substrate requirements, process gases, transfer needs and order-specific options.
The nanoPVD range covers compact benchtop systems for sputtering, thermal evaporation and combined process approaches.
| Feature | S10A | S10A-WA | T15A | ST15A |
|---|---|---|---|---|
| Sputtering (DC/RF magnetron) | Yes | Yes | No | Yes |
| Thermal / LTE evaporation | No | No | Yes | Yes |
| Hybrid (sputter + evaporate) | No | No | No | Yes |
| Reactive sputtering (MFC gas control) | Yes | Yes | No | Yes |
| Water-cooled magnetrons | Yes | Yes | No | Yes |
| Substrate heating up to 500°C | Yes | Yes | Yes | Yes |
| Glovebox compatible | No | No | No | No |
| Max substrate size | 4" (100 mm) | 8" (200 mm) | 4" (100 mm) | 4" (100 mm) |
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The MiniLab range provides modular PVD platforms across compact, glovebox-compatible, e-beam, sputtering, evaporation and larger research-platform configurations.
| Feature | 026 | 030 | 070 | 080 | 090 | 125 |
|---|---|---|---|---|---|---|
| Sputtering (magnetron) | Yes | Yes | Yes | Yes | Yes | Yes |
| E-beam evaporation | No | Yes | No | Yes | Yes | Yes |
| Thermal / LTE evaporation | Yes | Yes | Yes | Yes | Yes | Yes |
| HiPIMS / pulsed DC | Yes | Yes | Yes | Yes | Yes | Yes |
| Substrate heating up to 800°C | No | Yes | Yes | Yes | Yes | Yes |
| Substrate cooling | No | Yes | Yes | Yes | Yes | Yes |
| Substrate bias (RF + DC) | No | Yes | Yes | Yes | Yes | Yes |
| Load Lock (up to 8″ substrates) | No | No | Yes | Yes | Yes | Yes |
| Glovebox compatible | Yes | Yes | No | No | Yes | No |
| Dual chamber | No | No | Yes | Yes | Yes | Yes |
| Max substrate size | 6" (150 mm) | 6" (150 mm) | 8" (200 mm) | 8" (200 mm) | 8" (200 mm) | 12" (300 mm) |
| Product page | View product | View product | View product | View product | View product | View product |
Many features are configurable at order. Contact Moorfield to confirm the best specification for your application.